Micro – ring resonator with variety of gap width for acid rain sensing application: preliminary study

Budi Mulyanti¹, Harry Ramza², Roer Eka Pawinanto¹, Juwairiyah Abdul Rahman³, Mohammad Syuhaimi Ab–Rahman⁴, Wahyu Sasongko Putro¹, Lilik Hasanah¹, Arjuni Budi Pantjawati¹

1. ¹ Indonesia University of Education
2. ² Universitas Muhammadiyah Prof Dr Hamka
3. ³ University of Selangor
4. ⁴ National University of Malaysia

Journal of Physics Conference Series, 2017

The acid rain is an environmental disaster that it will be intimidates human life. The development micro-ring resonator sensor created from SOI (Silicon on insulator) and it used to detect acid rain index. In this study, the LUMERICAL software was used to simulate SOI material micro-ring resonator. The result shows the optimum values of fixed parameters from ring resonator have dependent variable in gap width. The layers under ring resonator with silicone (Si) and wafer layer of silicone material (Si) were added to seen three conditions of capability model. Model – 3 is an additional of bottom layer that gives the significant effect on the factor of quality. The optimum value is a peak value that given by the FSR calculation. FSR = 0, it means that is not shows the light propagation in the ring resonator and none of the light coming out on the bus – line.

DOI10.1088/1742-6596/852/1/012043Copy